Ghandhi, Sorab K. <br/><br/>
VLSI fabrication principles  Silicon and gallium arsendie / 

 - 2nd ed. 
 -  John Wiley and sons ,  2003. 
 - xxiv+834 
<br/><br/><label>ISBN: </label>9814126942 
<br/><br/><label>Subjects--Index Terms: </label>Circuit Electronics Engineering