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Microlithography: Process technology for IC fabrication

By: Material type: TextTextSeries: Publication details: Mcgraw Hill Book Co., London 1986Edition: Description: 378ISBN:
Subject(s): DDC classification:
  • R 621.3817 ELL-M
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Holdings
Item type Current library Home library Call number Status Date due Barcode
Book Book Dept. of Physics Processing Center Dept. of Physics R 621.3817 ELL-M (Browse shelf(Opens below)) Available PHY3594

$52

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