Micro and Nano Fabrication : Tools and Processes / by Hans H. Gatzen, Volker Saile, Jürg Leuthold.

By:

Gatzen, Hans H

Contributor(s):

Material type: Text

TextEdition: 1st ed. 2015Description: 1 online resource (XXVI, 519 pages 357 illustrations, 54 illustrations in color.)ISBN:

9783662443958

Subject(s):

DDC classification:

620.5

Contents:

Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.

Summary: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, id est, wafer planarization and bonding, as well as contamination control.

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Holdings
Item type	Current library	Home library	Collection	Call number	Status	Date due	Barcode
Book	Dept. of Optoelectronics Processing Center	Dept. of Optoelectronics	Non-fiction	620.5 GAT/M (Browse shelf(Opens below))	Available		DOP2918

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, id est, wafer planarization and bonding, as well as contamination control.

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