Fundamentals of microfabrication / Marc Madou.

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Material type: Text

TextPublication details: Boca Raton, Fla. : CRC Press, c1997.Description: 589 p., [22] p. of plates : ill. (some col.)ISBN:

Subject(s):

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Contents:

Lithography--dry etching techniques--wet bulk micromachining--surface micromachining--LIGA--microfabrication

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Holdings
Item type	Current library	Home library	Call number	Status	Date due	Barcode
Book	Dept. of Optoelectronics Processing Center	Dept. of Optoelectronics	621.38152 MAD/F (Browse shelf(Opens below))	Available		DOP1216

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Previous	621.38152 LEI/D1 Devices for optoelectronics /	621.38152 MAC.1/M Materials science in microelectronics / The relationships between thin film processing and structure	621.38152 MAC/M Materials Science in Microelectronics. Vol II: The effects of structure on properties in thin films/	621.38152 MAD/F Fundamentals of microfabrication /	621.38152 MAI/A Applications of silicon-germanium heterostructure devices	621.38152 MAN/S Semiconductor heterojunctions and nanostructures /	621.38152 MOR/C Computer-aided design of optoelectronic integrated circuits and systems /	Next

Includes bibliographical references (p. 565-569) and index.

Lithography--dry etching techniques--wet bulk micromachining--surface micromachining--LIGA--microfabrication

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