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Reliability of MEMS / edited by Osamu Tabata and Toshiyuki Tsuchiya.

Contributor(s): Material type: TextTextPublication details: Weinheim : Wiley-VCH, c2008.Description: xx, 303 p. : illISBN:
  • 9783527314942
  • 3527314946
Subject(s): DDC classification:
  • 539.60113 BRA/R
Online resources:
Contents:
MEMS
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Holdings
Item type Current library Home library Call number Status Date due Barcode
Book Book Dept. of Optoelectronics Processing Center Dept. of Optoelectronics 539.60113 TAB/R (Browse shelf(Opens below)) Available DOP1823

"Testing of materials and devices"--Cover.

Includes bibliographical references and index.

MEMS

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