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Handbook of thin film technology FREY, Hartmut; Khan, H. R,editor
Material type:
TextPublication details: Berlin Springer 2015Description: xiii,379pISBN: - 9783642054297
- 621.38152
Contents:
vacuum technology for thin film coating--vacuum evaporation--plasma physics--cathode sputtering--particle beam source--chemical vapor deposition--nanoparticle films
| Item type | Current library | Home library | Collection | Call number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|
Book
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Dept. of Optoelectronics Processing Center | Dept. of Optoelectronics | Reference | 621.38152 FRE/H (Browse shelf(Opens below)) | Available | DOP2954 |
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| 621.38152 BAL.5/H Handbook of semiconductor nanostructures and nanodevices / | 621.38152 BHA/S8 Semiconductor optoelectronic devices | 621.38152 CHR/P Pulsed laser deposition of thin films / | 621.38152 FRE/H Handbook of thin film technology | 621.38152 GOS/T Thin film fundamentals | 621.38152 HEN/H Handbook of self assembled semiconductor nanostructures for novel devices in photonics and electronics / | 621.38152 NG/C Complete guide to semiconductor devices / |
vacuum technology for thin film coating--vacuum evaporation--plasma physics--cathode sputtering--particle beam source--chemical vapor deposition--nanoparticle films
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