Science and engineering of microelectronic fabrication (Record no. 481267)

MARC details
000 -LEADER
fixed length control field 00485nam a2200181 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780195105087
Terms of availability 295
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152 CAM-S
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Campbell, Stephen A
245 ## - TITLE STATEMENT
Title Science and engineering of microelectronic fabrication
250 ## - EDITION STATEMENT
Edition statement
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Oxford University Press, New York
Date of publication, distribution, etc. 1996
300 ## - PHYSICAL DESCRIPTION
Extent 536
490 ## - SERIES STATEMENT
Series statement
500 ## - GENERAL NOTE
General note
590 ## - LOCAL NOTE (RLIN)
Local note VMV
Provenance (VM) [OBSOLETE]
Condition of individual reels (VM) [OBSOLETE] 295
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductor devices; Electronics engineering; Applied physics
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Book
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Cost, normal purchase price Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
        Dept. of Physics Dept. of Physics Processing Center 06/01/2022 295.00   621.38152 CAM-S PHY5451 24/09/2019 24/09/2019 Book