MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01898cam a2200217 a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780521516136 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3815/2 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Tu, K. N. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Electronic thin film reliability / |
| Statement of responsibility, etc. |
King-Ning Tu. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Cambridge ; |
| -- |
New York : |
| Name of publisher, distributor, etc. |
Cambridge University Press, |
| Date of publication, distribution, etc. |
2011. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xvi, 396 p. : |
| Other physical details |
ill. ; |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc. |
"Thin films are widely used in the electronic device industry. As the trend for miniaturization of electronic devices moves into the nanoscale domain, the reliability of thin films becomes an increasing concern. Building on the author's previous book, Electronic Thin Film Science by Tu, Mayer and Feldman, and based on a graduate course at UCLA given by the author, this new book focuses on reliability science and the processing of thin films. Early chapters address fundamental topics in thin film processes and reliability, including deposition, surface energy and atomic diffusion, before moving onto systematically explain irreversible processes in interconnect and packaging technologies. Describing electromigration, thermomigration and stress migration, with a closing chapter dedicated to failure analysis, the reader will come away with a complete theoretical and practical understanding of electronic thin film reliability. Kept mathematically simple, with real-world examples, this book is ideal for graduate students, researchers and practitioners"-- |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Thin films |
| Form subdivision |
Textbooks. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Reliability (Engineering) |
| Form subdivision |
Textbooks |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="http://assets.cambridge.org/97805215/16136/cover/9780521516136.jpg">http://assets.cambridge.org/97805215/16136/cover/9780521516136.jpg</a> |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy1012/2010033855-b.html">http://www.loc.gov/catdir/enhancements/fy1012/2010033855-b.html</a> |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy1012/2010033855-d.html">http://www.loc.gov/catdir/enhancements/fy1012/2010033855-d.html</a> |
| 856 41 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy1012/2010033855-t.html">http://www.loc.gov/catdir/enhancements/fy1012/2010033855-t.html</a> |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Book |
