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Fundamentals of Microfabrication and Nanotechnology vol.III: From MEMS to Bio-MEMS and Bio- NEMS;

Madou, Marc J.

Fundamentals of Microfabrication and Nanotechnology vol.III: From MEMS to Bio-MEMS and Bio- NEMS; Madou, Marc J. - London, CRC PRESS, 2012. - IX,638P.,

ISBN: 978-1-4200-5516-0

Dewey Class. No.: 681.2 / MAD/F

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