Fundamentals of Microfabrication and Nanotechnology: Solid- state Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology;
Madou, Marc J
Fundamentals of Microfabrication and Nanotechnology: Solid- state Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology; Madou, Marc J - London; CRC Press, 2012. - vii,641p.
978-1-4200-5511-5
681.2 / MAD/F
Fundamentals of Microfabrication and Nanotechnology: Solid- state Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology; Madou, Marc J - London; CRC Press, 2012. - vii,641p.
978-1-4200-5511-5
681.2 / MAD/F