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Patterning of materian layers in submicron region

Tandon, U S; Khokle, W S

Patterning of materian layers in submicron region - - Wiley Eastern Limited, New Delhi 1993 - 183 - .

ISBN: 450

Subjects--Topical Terms:
Lithography, Electron beam

Dewey Class. No.: 621.381531 TAN-P

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