Micromechanical photonics /
Ukita, H.
Micromechanical photonics / H. Ukita. - Berlin : Springer-Verlag, c2006. - xi, 250 p. : ill. ;
Includes bibliographical references (p. [227]-242) and index.
3540313338 (hbk. alk. paper) 9783540313335 (hbk. alk. paper)
Photonics.
Microelectronics.
Microelectromechanical systems.
621.36
Micromechanical photonics / H. Ukita. - Berlin : Springer-Verlag, c2006. - xi, 250 p. : ill. ;
Includes bibliographical references (p. [227]-242) and index.
3540313338 (hbk. alk. paper) 9783540313335 (hbk. alk. paper)
Photonics.
Microelectronics.
Microelectromechanical systems.
621.36