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CMOS-MEMS. Vol. 2: Advanced Micro and Nanosystems/

CMOS-MEMS. Vol. 2: Advanced Micro and Nanosystems/ edited by O.Brand and G.K.Fedder - Germany wiley-vch

material characterization

ISBN: 9783527310807

Dewey Class. No.: 621.3815 BRA/C

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