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Micromachines as tools for nanotechnology

Fujita, H

Micromachines as tools for nanotechnology - - Springer (India) Pvt Ltd., New Delhi 2004 - 211 - .

ISBN: 9798181282025 595

Subjects--Topical Terms:
Microelectromechanical systems

Dewey Class. No.: 620.115 FUJ-M

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