BioNanoFluidic MEMS /

BioNanoFluidic MEMS / Peter J. Hesketh, editor. - New York : Springer, 2008. - x, 295 p. : ill. ; - MEMS reference shelf .

Reprinted as softcover in 2010.

Includes bibliographical references and index.

Nanotechnology: retrospect and prospect / James D. Meindl -- Synthesis of oxide nanostructures / Chenguo Hu, Hong Liu, and Zhong Lin Wang -- Nanolithography / Raghunath Murali -- Nano/microfabrication methods for sensors and NEMS/MEMS / Peter J. Hesketh -- Micro- and nanomanufacturing via molding / Harry D. Rowland and William P. King -- Temperature measurement of microdevices using thermoreeflectance and raman thermometry / Thomas Beechem and Samuel Graham -- Stereolithography and rapid prototyping / David W. Rosen -- Case studies in chemical sensor development / Gary W. Hunter, Jennifer C. Xu, and Darby B. Makel -- Engineered nanopores / Amir G. Ahmadi and Sankar Nair -- Engineering biomaterial interfaces through micro and nano-patterning / Joseph L. Charest and William P. King -- Biosensors micro and nano integration / Ravi Doraiswami.

9780387462813 (alk. paper) 0387462813 (alk. paper) 9780387462837 (eISBN)


Microelectromechanical systems.
Nanotechnology--OXIDE nanostructures--nanolithography--chemical sensor
Biotechnology.
MEMS.

620.115