Materials science of thin films : deposition and structure /

Ohring, Milton,

Materials science of thin films : deposition and structure / Milton Ohring. - 2nd ed. - San Diego, CA : Academic Press, 2002. - xxi, 794 p. : ill. ;

Includes bibliographical references and index.

0125249756 (alk. paper)


Thin films.

621.3815/2