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Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems

Feldman,Martin,Ed.

Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems - - Woodhead publihing ltd , Cambridge 2014

ISBN: 9 19175.0

Dewey Class. No.: R 621.381 531 FEL/N

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