Semiconductors for micro- and nanotechnology : an introduction for engineers /
Korvink, J. G.
Semiconductors for micro- and nanotechnology : an introduction for engineers / Jan G. Korvink and Andreas Greiner. - Weinheim : Wiley-VCH, c2002. - 340 p. : ill. ;
Includes bibliographical references and index.
3527302573
Semiconductors--Textbooks.
Nanotechnology--Textbooks.
Microtechnology--Textbooks.
621.38152
Semiconductors for micro- and nanotechnology : an introduction for engineers / Jan G. Korvink and Andreas Greiner. - Weinheim : Wiley-VCH, c2002. - 340 p. : ill. ;
Includes bibliographical references and index.
3527302573
Semiconductors--Textbooks.
Nanotechnology--Textbooks.
Microtechnology--Textbooks.
621.38152